A quantitative model for doping contrast in the scanning electron microscope using calculated potential distributions and Monte Carlo simulations
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چکیده
microscope using calculated potential distributions and Monte Carlo simulations Augustus K. W. Chee, Ronald F. Broom, Colin J. Humphreys, and Eric G. T. Bosch Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, Cambridge CB2 3QZ, United Kingdom Department of Engineering, Electrical Engineering Division, Centre for Advanced Photonics and Electronics, University of Cambridge, 9 JJ Thompson Avenue, Cambridge CB3 0FA, United Kingdom FEI Electron Optics, FEI Company, Building AAE, Achtseweg Noord 5, Eindhoven 5651 GG, The Netherlands
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تاریخ انتشار 2011